Mass spectrometry of neutrals and positive ions in He/CO2 non-equilibrium atmospheric plasma jet

Abstract

Abstract Neutral species and positive ions are measured by means of mass spectrometry in the effluent of the non-equilibrium atmospheric plasma jet operated in He/0%–1%CO2 gas mixture. The capacitively coupled plasma source is the predecessor of the known COST reference jet with identical performance and it is operated in a diffuse mode with gas temperature close to the room temperature. Threshold ionisation molecular beam mass spectrometry is used to measure absolute densities of CO, O2, O and O3 species. The CO molecules are generated with densities up to 2 × 1015 cm−3 at 1 W absorbed power. The O2 density is ∼6 times lower than the CO density and even lower than the O density at level of 4.5 × 1014 cm−3. The O3 density is negligibly small at 4 × 1012 cm−3. The measured O2, O3 and O absolute densities add up to ∼57% of the expected oxygen amount. The high O density could indicate that the vibrational excitation of CO2 is ineffective in this plasma and gas mixture, because O would otherwise react quickly with vibrationally excited CO2(v) to form CO and O2, the low energy efficiency is in agreement with the possibly low vibrational excitation. The highest energy efficiency is just 5% with 1% conversion efficiency. Ion mass spectrometry have been used to measure positive and negative ions, where only positive ions have been detected. The ion with highest signal is the O 2 + ion, probably due to its low ionisation energy. CO 2 + , O 3 + , ( CO ) 2 + , but no CO+, and protonated clusters or clusters containing water molecules have been detected as well. Neutrals and positive ions have been measured as a function of CO2 admixture, applied power and distance to the jet nozzle. The observed trends can be used for validation of plasma-chemistry models.