Interferometric device for the in-process measurement of diameter variation in the manufacture of ultraprecise spheres

Abstract

Abstract A novel device is presented which is designed for in-process measurements of the variation of the diameter of highly reflective spheres. Silicon spheres have been used for the new definition of the International System of Units (SI). Many spheres have to be processed, and the form of these objects, and thus the manufacturing process’s stability, needs to be controlled every day. Commercially available measurement equipment and even state-of-the-art spherical interferometers have reached their limits in terms of resolution, uncertainty, the complexity of their handling routines, measurement time and even financial investment. A novel setup has thus been designed after considering and selecting a special mechanical setup with a minimal measurement loop, stable optical sensors and a handling strategy which avoids collision and contact with the very valuable, superpolished spherical objects. Thus, the design minimizes the influence of the environment and reduces the measurement time at an equator with sub-nanometre resolution to 3 min. In addition, the analysis time is reduced to less than a minute.