A new centering method of the measuring probe for spiral scanning-based surface profile measurement systems-Reference-Cited by-同舟云学术

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A new centering method of the measuring probe for spiral scanning-based surface profile measurement systems

Published:2016-12-21 Issue:2 Volume:28 Page:025006
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Du Hui-Lin,Zeng Pei-Yang,Ju Bing-Feng,Zhou Zhao-Zhong,Xu Shaoning,Sun Anyu

Funder

Zhejiang Provincial Natural Science Foundation of China

Science Fund for Creative Research Groups of National Natural Science Foundation of China

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/28/i=2/a=025006/pdf

Reference17 articles.

1. Measurement of free surface deformation in PIV images

2. Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy

3. Surface measurements by white light spatial-phase-shift imaging interferometry

4. An ultra-precision scanning tunneling microscopeZ-scanner for surface profile measurement of large amplitude micro-structures

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1. Unified framework for geometric error compensation and shape-adaptive scanning in five-axis metrology systems;Measurement Science and Technology;2024-05-28

2. Chromatic confocal sensor-based on-machine measurement for microstructured optical surfaces featuring a self-aligned spiral center;Optics Express;2023-04-26

3. Investigation on probe positioning errors affecting on-machine measurements on ultra-precision turning machines;Procedia CIRP;2021

4. New positioning procedure for optical probes integrated on ultra-precision diamond turning machines;CIRP Annals;2020

5. Enhancing the metrological performance of non-raster scanning probe microscopy using Gaussian process regression;Measurement Science and Technology;2019-07-19

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