A novel method for quantitative height measurement based on an astigmatic optical profilometer
Author:
Funder
Ministry of Science and Technology, Taiwan
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/aadc49/pdf
Reference21 articles.
1. An optical profilometer for the characterisation of parabolic trough solar concentrators
2. Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler
3. Characterizing three-dimensional topography of engineering and biomaterial surfaces by confocal laser scanning and stylus techniques
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