Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer
Author:
Funder
Japan Society for the Promotion of Science
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
https://iopscience.iop.org/article/10.1088/1361-6501/ab8b83/pdf
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