A large-pressure-range, large-sensing-distance wireless passive pressure sensor based on polymer infiltration pyrolysis-enhanced polymer-derived ceramic films-Reference-Cited by-同舟云学术

A large-pressure-range, large-sensing-distance wireless passive pressure sensor based on polymer infiltration pyrolysis-enhanced polymer-derived ceramic films

Published:2020-04-29 Issue:7 Volume:31 Page:075103
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Yu Yuxi^ORCID,Liu Yixin

Funder

the Fund of Nuclear Power Institute of China for Innovation

Joint Fund for Equipment Pre-research and Aerospace Science and Technology

Financial support from the Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

https://iopscience.iop.org/article/10.1088/1361-6501/ab7caa/pdf

Reference33 articles.

1. MEMS Technology- from Automotive to Consumer

2. Passive single chip wireless microwave pressure sensor

3. Fabrication of a CMOS compatible pressure sensor for harsh environments

4. Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique

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