High accuracy step gauge interferometer
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/aaad32/pdf
Reference18 articles.
1. Geometric error measurement and compensation of machines—An update
2. Error mapping of CMMs and machine tools by a single tracking interferometer
3. Results of the CIRP-Euromet Intercomparison of Ball Plate-Based Techniques for Determining CMM Parametric Errors
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