High-precision projection moiré measurement method based on virtual reality bridging

Abstract

Abstract The projection moiré method is a high-precision optical topography measurement method. The existing moiré models calibrate the phase-height mapping relationship by setting and moving the reference plane, which introduces many system errors and reduces the usability and scanning scalability of the methods. This paper proposes a moiré model based on virtual reality bridging and the corresponding scanning method. First, we use the imaging parameters of the real moiré system and the derived moiré phase correspondence to build a virtual moiré model matching the real system. Then we use a variety of phase optimization algorithms to improve the coincidence between the virtual and the reality. In addition, we propose a method to calculate the pose between views to facilitate the reconstruction of the corresponding virtual moiré model during scanning measurement. Finally, we use the virtual moiré model and scanning method to conduct fixed position and scanning measurements. The results show that the proposed virtual moiré model has high accuracy and robustness, and the scanning method can achieve high-precision full-field three-dimensional shape measurement.