In situconductance monitoring of Pt thin film growth by area-selective atomic layer deposition-Reference-Cited by-同舟云学术

In situconductance monitoring of Pt thin film growth by area-selective atomic layer deposition

Published:2017-10-04 Issue:2 Volume:1 Page:025005
ISSN:2399-1984
Container-title:Nano Futures
language:
Short-container-title:Nano Futures

Author:

Prima Giorgia Di,Sachser Roland,Gruszka Peter,Hanefeld Marc,Halbritter Thomas,Heckel Alexander,Huth Michael

Funder

Deutsche Forschungsgemeinschaft

Beilstein-Institut zur Förderung der Chemischen Wissenschaften

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,General Materials Science,Biomedical Engineering,Atomic and Molecular Physics, and Optics,General Chemistry,Bioengineering

Link

http://iopscience.iop.org/article/10.1088/2399-1984/aa8cbb/pdf

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