Author:
Liu Yali,Li Wei,Li Yudong,Li Xiaokuan,Feng Liangsen,Li Xinliang
Abstract
Abstract
Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes. A self-built absorption spectrum testing system is used to test the absorption spectra of the rubidium atoms in alkali atom vapor cells. The influence of silicon cavity size, filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis. This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials