A metrological atomic force microscope system

Author:

Wu YitingORCID,Wirthmann Elisa,Klöpzig Ute,Hausotte Tino

Abstract

Abstract A new metrological atomic force microscope (MAFM) with combined deflection detection system that comprises a homodyne interferometer and an optical beam deflection measuring system are presented. The combination allows the simultaneous three-dimensional detection of position, bending and torsion of the cantilever. Two wedge plates with a wedge angle of 0.5° have been integrated to reduce the disturbing interferences. The new measuring system uses two tiltable plane mirrors and a shiftable focus lens to adjust the direction of the focused laser beam and the position of the focus. The integration of the MAFM head in a nanomeasuring machine (NMM-1) creates the possibility of traceable dimensional measurements over a large range of 25 mm × 25 mm × 5 mm with sub-nanometre resolution. This paper introduces its setup, realisation and metrological properties, such as stability of the characteristic curves, noise level and combined measurement uncertainty. Finally, exemplary measurement results are presented.

Publisher

IOP Publishing

Subject

General Medicine

Reference20 articles.

1. Scanning probe microscopy, scanning electron microscopy and critical dimension: nanometrology status and future needs within Europe;Danzebrink,2009

2. Recent developments in dimensional nanometrology using AFMs;Yacoot;Measurement Science and Technology,2011

3. Investigation of a metrological atomic force microscope system with a combined cantilever position, bending and torsion detection system;Wu;SMSI,2020

4. Fully low voltage and large area searching scanning tunneling microscope;Pang;Measurement Science and Technology,2009

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