Fabrication and structural characterization of a resonant frequency PZT microcantilever-Reference-Cited by-同舟云学术

Fabrication and structural characterization of a resonant frequency PZT microcantilever

Published:2001-04-01 Issue:2 Volume:10 Page:252-263
ISSN:0964-1726
Container-title:Smart Materials and Structures
language:
Short-container-title:Smart Mater. Struct.

Author:

Zurn S,Hsieh M,Smith G,Markus D,Zang M,Hughes G,Nam Y,Arik M,Polla D

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing

Reference40 articles.

1. Microelectromechanical filters for signal processing

2. Vapor Detection Using Resonating Microcantilevers

3. Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers

4. Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors

5. A silicon resonant sensor structure for Coriolis mass-flow measurements

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