A modified positive velocity and position feedback scheme with delay compensation for improved nanopositioning performance-Reference-Cited by-同舟云学术

A modified positive velocity and position feedback scheme with delay compensation for improved nanopositioning performance

Published:2015-06-11 Issue:7 Volume:24 Page:075021
ISSN:0964-1726
Container-title:Smart Materials and Structures
language:
Short-container-title:Smart Mater. Struct.

Author:

San-Millan Andres,Russell Douglas,Feliu Vicente,Aphale Sumeet S

Funder

Ministerio de Educacion, Cultura y Deporte:

Ministerio de Economia y Competitividad and European Social Fund:

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing

Link

http://stacks.iop.org/0964-1726/24/i=7/a=075021/pdf

Reference30 articles.

1. A Survey of Control Issues in Nanopositioning

2. A Low-Cost Flexure-Based Handheld Mechanism for Micromanipulation

3. An Integrated Parallel Micromanipulator with Flexure Hinges for Optical Fiber Alignment

4. Advances in AFM for the electrical characterization of semiconductors

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