Characterization of sputtering deposited NiTi shape memory thin films using a temperature controllable atomic force microscope-Reference-Cited by-同舟云学术

Characterization of sputtering deposited NiTi shape memory thin films using a temperature controllable atomic force microscope

Published:2004-07-02 Issue:5 Volume:13 Page:977-982
ISSN:0964-1726
Container-title:Smart Materials and Structures
language:
Short-container-title:Smart Mater. Struct.

Author:

He Q,Huang W M,Hong M H,Wu M J,Fu Y Q,Chong T C,Chellet F,Du H J

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing

Reference11 articles.

1. Thin film shape memory alloy microactuators

2. Sputter-Deposited Shape-Memory Alloy Thin Films: Properties and Applications

3. Thin film shape memory microvalves with adjustable operation temperature

4. Thin-film shape-memory alloy actuated micropumps

5. Manufacturing issues of thin film NiTi microwrapper

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