An Interferometric Method to Measure Oscillatory Displacements, 2 nm - 255 nm
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Published:1989-01-01
Issue:2
Volume:26
Page:127-131
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ISSN:0026-1394
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Container-title:Metrologia
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language:
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Short-container-title:Metrologia
Subject
General Engineering
Cited by
4 articles.
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