Sub-10 nanometre fabrication: molecular templating, electron-beam sculpting and crystallization of metallic nanowires
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Link
http://stacks.iop.org/0957-4484/16/i=8/a=032/pdf
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1. Fabrication of 3 nm wires using 100 keV electron beam lithography and poly(methyl methacrylate) resist
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