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Permanent reduction of dissipation in nanomechanical Si resonators by chemical surface protection

  • Published:2015-10-26 Issue:46 Volume:26 Page:465501
  • ISSN:0957-4484
  • Container-title:Nanotechnology
  • language:
  • Short-container-title:Nanotechnology

Author:

Tao Y,Navaretti P,Hauert R,Grob U,Poggio M,C L Degen

Funder

European Research Council

Schweizerische Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

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3. Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution;Nature Nanotechnology;2024-03-05

4. Responsivity and Sensitivity;Fundamentals of Nanomechanical Resonators;2023

5. Damping;Fundamentals of Nanomechanical Resonators;2023
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