AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection-Reference-Cited by-同舟云学术

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

Published:2004-04-17 Issue:7 Volume:15 Page:771-776
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Villarroya María,Pérez-Murano Francesc,Martín Cristina,Davis Zachary,Boisen Anja,Esteve Jaume,Figueras Eduard,Montserrat Josep,Barniol Núria

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/15/i=7/a=009/pdf

Reference15 articles.

1. Micromechanics: A toolbox for femtoscale science: “Towards a laboratory on a tip”

2. A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout

3. Translating Biomolecular Recognition into Nanomechanics

4. Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

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