Lithographic pattern formation via metastable state rare gas atomic beams-Reference-Cited by-同舟云学术

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Lithographic pattern formation via metastable state rare gas atomic beams

Published:2004-08-14 Issue:9 Volume:15 Page:1356-1362
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Baker M,Palmer A J,MacGillivray W R,Sang R T

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/15/i=9/a=041/pdf

Reference24 articles.

1. Nanofabrication using neutral atomic beams

2. Atomic nanofabrication: atomic deposition and lithography by laser and magnetic forces

3. Using light as a lens for submicron, neutral-atom lithography

4. Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers

5. Rapid communication Photoemission of spinpolarized electrons from strained GaAsP

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1. Correlation analysis of frustrated tunneling ionization;Physical Review A;2023-04-07

2. Carrier-Envelope Phase-Dependent Strong-Field Excitation;Physical Review Letters;2022-04-26

3. Observation of dynamic Stark resonances in strong-field excitation;Physical Review A;2020-05-04

4. Laser-Based Metastable Krypton Generation;Physical Review Letters;2018-08-31

5. Conclusion;Neutral Atom Imaging Using a Pulsed Electromagnetic Lens;2017-11-01

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