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Fabrication of four-probe fine electrodes on an atomically smooth Si(100)-2 × 1-H surface

  • Published:2004-03-24 Issue:6 Volume:15 Page:S333-S336
  • ISSN:0957-4484
  • Container-title:Nanotechnology
  • language:
  • Short-container-title:Nanotechnology

Author:

Fujimori Masaaki,Heike Seiji,Terada Yasuhiko,Hashizume Tomihiro

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. All-optical lithography process for contacting nanometer precision donor devices;Applied Physics Letters;2017-11-06

3. Innovative Solutions for the Nanoscale Packaging of Silicon-Based and Biological Nanowires: Development of a Generic Characterization and Integration Platform;IEEE Transactions on Components, Packaging and Manufacturing Technology;2016-12

4. Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-09

5. Defining nanoscale metal features on an atomically clean silicon surface with a stencil;Nanotechnology;2008-06-02
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