A new technique for fabricating three-dimensional micro- and nanostructures of various shapes-Reference-Cited by-同舟云学术

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A new technique for fabricating three-dimensional micro- and nanostructures of various shapes

Published:2001-11-28 Issue:4 Volume:12 Page:399-402
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Prinz V Ya,Grützmacher D,Beyer A,David C,Ketterer B,Deckardt E

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/12/i=4/a=301/pdf

Reference8 articles.

1. Sub-10 nm Linewidth and Overlay Performance Achieved with a Fine-Tuned EBPG-5000 TFE Electron Beam Lithography System

2. Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays

3. Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils

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