Abstract
Abstract
The piezoelectric coefficient of intrinsic AlN is not meeting the demand from some high-performance applications in MEMS compared with the commercialized piezoelectric ceramics. Therefore, we conducted a first principles calculation investigation of the piezoelectric properties of Mg-Hf co-doped AlN structures with the same doping proportion (Mg
x/2Hf
x/2Al1−x
N) to further improve the performance of AlN materials. The analysis results suggested the co-doped structures show decreased band gap values with a non-symmetrical charges assignation. Consequently, both the elastic constant C
33 and Young’s modulus are largely reduced. Furthermore, the co-doped structure shows a drastically improved piezoelectric coefficient d
33 compared with intrinsic AlN.
Funder
National Natural Science Foundation of Chongqing
National Key R&D Program of China
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials