Grain size and nanoscale effects on the nonlinear pull-in instability and vibrations of electrostatic actuators made of nanocrystalline material
Author:
Publisher
IOP Publishing
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/2053-1591/aaa048/pdf
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1. A batch-fabricated silicon accelerometer
2. A MEMS-based projection display
3. Studying the effects of small scale and Casimir force on the non-linear pull-in instability and vibrations of FGM microswitches under electrostatic actuation
4. Cantilever beam electrostatic MEMS actuators beyond pull-in
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