Abstract
Abstract
Thin film sensors are used to monitor environmental conditions by measuring the physical parameters. By using thin film technology, the sensors are capable of conducting precise measurements. Moreover, the measurements are stable and dependable. Furthermore, inexpensive sensor devices can be produced. In this paper, thin film technology for the design and fabrication of sensors that are used in various applications is reviewed. Further, the applications of thin film sensors in the fields of biomedical, energy harvesting, optical, and corrosion applications are also presented. From the review, the future research needs and future perspectives are identified and discussed.
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献