Large-scale preparation of 22.06% efficiency single-crystalline silicon solar cells with inverted pyramid microstructure through nanostructure rebuilding treatment

Abstract

Abstract The inverted pyramid microstructures (IPMS) were fabricated jointly by metal-assisted chemical etching (MACE) technology with extremely low concentration of silver ions to formed nanopores and nanostructure rebuilding (NSR) treatment of NH4HF2 solution. The results show nanopores were achieved with the aid of Ag-MACE technology, which diameter was mainly affected by the action of Ag ions, and depth was yet mainly influenced by HF concentration. Textured IPMS single-crystalline silicon (sc-Si) solar cells with the diameter of 1 μm and reflectivity of 8.62% were large-scale prepared. Benefiting from better light-trapping ability, the photoelectric conversion efficiency of IPMS sc-Si solar cells in standard size of 156.75 × 156.75 mm2 achieved 22.06%. Simultaneously, the short-circuit current was increased by 71 mA. This promising technology could become a viable solution for industrial production of highly efficient sc-Si solar cells in the foreseeable future.