Abstract
Abstract
Amorphous germanium films with different thicknesses are deposited by magnetron sputtering (MS) method. Optical band gap and surface resistance are characterized. Our analysis reveals that there are three kinds of structural relaxation (SR) that may occur in amorphous germanium (a-Ge), and they are spontaneous SR (SSR), annealing-induced SR (AISR), and medium range order (MRO)-to-continuous random network (CRN) Sr Samples all demonstrate a band gap widening after these kinds of Sr The properties and mechanisms of SSR, AISR, and MRO-to-CRN SR are elucidated, respectively, which sheds some light on the controversies about SR in a-Ge films. In addition, some experimental results about SSR and AISR are also provided.
Funder
the National Key R&D Program of China
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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