Fabrication of SiO2 microcantilever arrays for mechanical loss measurements-Reference-Cited by-同舟云学术

Fabrication of SiO2 microcantilever arrays for mechanical loss measurements

Published:2019-01-16 Issue:4 Volume:6 Page:045206
ISSN:2053-1591
Container-title:Materials Research Express
language:
Short-container-title:Mater. Res. Express

Author:

Mariana Shinta^ORCID,Hamdana Gerry,Dickmann Johannes^ORCID,Bertke Maik,Michel Christophe^ORCID,Meyer Jan,Yulianto Nursidik,Cagnoli Gianpietro,Peiner Erwin,Waag Andreas,Granata Massimo^ORCID,Kroker Stefanie,Wasisto Hutomo Suryo^ORCID

Funder

LENA-OptoSense funded by the Lower Saxony Ministry for Science and Culture

Georg-Christoph-Lichtenberg Ph.D. scholarship

RISET-Pro by RISTEKDIKTI

NanoMet RTG 1952/1 ’Metrology for Complex Nanosystems’

German Research Foundation

‘Niedersächsisches Vorab’, Germany, through the Quantum- and Nanometrology (QUANOMET) initiative

Publisher

IOP Publishing

Subject

Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/2053-1591/aafab7/pdf

Reference46 articles.

1. Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors

2. Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

3. Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

4. Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever

5. Portable cantilever-based airborne nanoparticle detector

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