Growth and characterization of nanocrystalline SrTiOxfilms: room temperature deposition using RF sputtering system in a pure argon environment
Author:
Publisher
IOP Publishing
Subject
Metals and Alloys,Polymers and Plastics,Surfaces, Coatings and Films,Biomaterials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/2053-1591/4/i=5/a=055016/pdf
Reference41 articles.
1. Light emission from SrTiO3
2. Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
3. Ferroelectric properties of compressively strained epitaxial SrTiO3 films on sapphire
4. Resistive switching and changes in microstructure
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2. Electro‐optical performances of nanostructured SrTiO x films: The effect of plasma power, Ar/O 2 ratio and annealing;International Journal of Applied Ceramic Technology;2021-02-08
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