Dynamical Analysis of Sputtering at Threshold Energy Range: Modelling of Ar+Ni(100) Collision System
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/25/2/102/pdf
Reference14 articles.
1. Sputtering by Particle Bombardment I
2. Sputtering by ion bombardment theoretical concepts
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1. Reconsideration of metal surface sputtering due to bombardment of high-energy argon ion particles: a molecular dynamics study;Computational Particle Mechanics;2015-09-19
2. Molecular dynamics of thermal vibration effects: Ar+Ni(100) collision system;Communications in Nonlinear Science and Numerical Simulation;2010-04
3. C2H4-Based Plasma-Assisted CD Shrink and Contact Patterning for RRAM Application;MRS Proceedings;2010
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