Numerical Study on Characteristics of Argon Radio-Frequency Glow Discharge with Varying gas Pressure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/25/7/065/pdf
Reference12 articles.
1. Fluid simulations of glow discharges: Effect of metastable atoms in argon
2. A two‐dimensional fluid model for an argon rf discharge
3. Continuum modeling of radio‐frequency glow discharges. I. Theory and results for electropositive and electronegative gases
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