Deposition of Hydrogen-Free Silicon Nitride Thin Films by Microwave ECR plasma Enhanced Magnetron Sputtering at Room Temperature
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference17 articles.
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3. Preparation and characterization of silicon nitride (SiN)-coated carbon fibers and their effects on thermal properties in composites;Materials Science and Engineering: B;2015-10
4. The microstructure and optical properties of SiNx deposited by linear microwave chemical vapor deposition;Acta Physica Sinica;2015
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