Pt/Ti Electrodes of PZT Thin Films Patterning by Novel Lift-Off Using ZnO as a Sacrificial Layer
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/25/1/083/pdf
Reference13 articles.
1. Influence of Interface Structure on Chemical Etching Process for Air Gap of Microelectromechanical System Based on Surface Micromachining
2. Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms
3. Fabrication and Characterization of Pb(Zr,Ti)O3Microcantilever for Resonance Sensors
4. Influencing factors on the pyroelectric properties of Pb(Zr,Ti)O3 thin film for uncooled infrared detector
5. PZT MIM Capacitor With Oxygen-Doped Ru-Electrodes for Embedded FeRAM Devices
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Micro-patterning of PZT thick film by lift-off using ZnO as a sacrificial layer;Ceramics International;2015-07
2. Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films;Microsystem Technologies;2012-12-29
3. High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas;Electronic Materials Letters;2009-12-31
4. Design and Fabrication of a Novel PZT Films Based Piezoelectric Micromachined Ultrasonic Transducers;2009 International Conference on Measuring Technology and Mechatronics Automation;2009-04
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