Scanning-Position Error-Correction algorithm in Dual-Wavelength Ptychographic Microscopy*

Abstract

We propose a new algorithm for the error correction of scanning positions in ptychographic microscopy. Since the scanning positions are varied mechanically by moving the illuminating probes laterally, the scanning errors will accumulate at multiple positions, greatly reducing the reconstruction quality of a sample. To correct the scanning errors, we use the correlation analysis for the diffractive data combining with the additional constraint of dual wavelengths. This significantly improves the quality of ptychographic microscopy. Optical experiments verify the proposed algorithm for two samples including a resolution target and a fibroblast.