Laser Cleaning Techniques for Removing Surface Particulate Contaminants on Sol-Gel SiO 2 Films
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/28/7/074205/pdf
Reference12 articles.
1. Laser-induced surface damage of optical materials: absorption sources, initiation, growth, and mitigation
2. Surface evolution and laser damage resistance of CO2 laser irradiated area of fused silica
3. Laser-induced damage mechanism of the sol–gel single-layer SiO2 acid and base thin films
4. Mechanism of damage formation in antireflection coatings
5. Removal versus ablation in KrF dry laser cleaning of polystyrene particles from silicon
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