Surface Acoustic Wave Humidity Sensors Based on $(11\bar{2}0)$ ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/32/8/086802/pdf
Reference17 articles.
1. Humidity Sensors: A Review of Materials and Mechanisms
2. Optical Sensors Based on Plastic Fibers
3. Highly sensitive humidity sensor based on quartz crystal microbalance coated with ZnO colloid spheres
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