Abnormal Crystallization of Silicon Thin Films Deposited by ICP-CVD
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference18 articles.
1. Photovoltaic Technology: The Case for Thin-Film Solar Cells
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3. Thin-film poly-Si solar cells on glass substrate fabricated at low temperature
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1. Thermal-sensitive superconducting coplanar waveguide resonator used for weak light detection;Acta Physica Sinica;2014
2. Anomalous Effect of Hydrogen Dilution on the Crystallinity of ICPCVD-Grown Silicon Thin Films at Very Low Temperature;Journal of Electronic Materials;2009-11-05
3. Study on the initial growth process of crystalline silicon films on aluminum-coated polyethylene napthalate by Raman spectroscopy;Journal of Crystal Growth;2007-10
4. Deposition and field emission properties of highly crystallized silicon films on aluminum-coated polyethylene napthalate;Journal of Crystal Growth;2007-08
5. Al-Induced Crystallization Growth of Si Films by Inductively Coupled Plasma Chemical Vapour Deposition;Chinese Physics Letters;2006-11-29
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