Fabrication of 11-nm-Wide Silica-Like Lines Using X-Ray Diffraction Exposure
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/26/8/086803/pdf
Reference11 articles.
1. A new approach to fabricating high density nanoarrays by nanocontact printing
2. Analysis of X-Ray Photoelectron Spectroscopy of Polymethyl Methacrylate Etched by a KrF Excimer Laser
3. Ferromagnetism and possible application in spintronics of transition-metal-doped ZnO films
4. Large-Quantity Synthesis of Single-Crystalline Metal Indium Nano/Sub-Micron Wires
5. A pixel-based regularization approach to inverse lithography
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2. Quantifying reaction spread and x-ray exposure sensitivity in hydrogen silsesquioxane latent resist patterns with x-ray spectromicroscopy;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11
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