Author:
Desideri Daniele,Maschio Alvise,Doru Micu Dan,Ramona Miron Olivia
Abstract
PurposeThe aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source.Design/methodology/approachAn inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as a starting point a model identified with a simple analytical procedure based on measurements.FindingsA satisfactory equivalent model has been identified, and validated in several different conditions.Originality/valueThe proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.
Subject
Applied Mathematics,Electrical and Electronic Engineering,Computational Theory and Mathematics,Computer Science Applications
Reference13 articles.
1. Brown, D.N., Ma, B.M. and Chen, Z. (2002), “Developments in the processing and properties of NdFeB‐type permanent magnets”, Journal of Magnetism and Magnetic Materials, Vol. 248, pp. 432‐40.
2. Buschow, K.H.J. (1999), Permanent Magnetic Materials and their Applications, Trans Tech, Zurich.
3. Campbell, P. (1994), Permanent Magnet Materials and their Application, Cambridge University Press, Cambridge.
4. D'Amore, M. (2007), “Toward emerging technologies through the IEEE EMC Society”, IEEE Transactions on Electromagnetic Compatibility, Vol. 49, pp. 204‐10.
5. Desideri, D., Maschio, A. and Spolaore, M. (2008), “Design and realization of a magnetron sputtering device for deposition of electromagnetic shields”, Acta Electrotehnica, pp. 294‐7 (special issue).
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