Micro sensor developments in Japan-Reference-Cited by-同舟云学术

Micro sensor developments in Japan

Published:1999-03-01 Issue:1 Volume:19 Page:37-42
ISSN:0260-2288
Container-title:Sensor Review
language:en
Short-container-title:

Author:

Tsuruta Kazuhiro,Mikuriya Yoshikazu,Ishikawa Yuichi

Abstract

This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991 as a ten‐year project. The R&D goal is to establish technologies to realize micromachines for the following practical applications; maintenance and repair of power plant facilities; miniaturization of manufacturing facilities; medical diagnosis and treatment. As a result, various types of micro sensors have been successfully developed.

Publisher

Emerald

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering

Reference14 articles.

1. 1Koga, A., Suzumori, K., Miyagawa, T. and Sekimura, M., “Attachment/detachment electrostic micro acuators for Pan‐tilt drive of a micro CCD camera”, Proc. IEEE Micro Electro Mechanical Systems Workshop, San Diego, CA, February 1996, pp. 509‐14.

2. 2Koga, A., Suzumori, K., Sudo, H., IIkura, S. and Kimura, M., “Electrostatic linear microactuator mechanism for focusing a CCD camera”, Tech. Digest. International Conference on Optical MEMS and their Applications (MOEMS97), Nara, Japan, November 1997, pp. 50‐5.

3. 3Maeda, S., Abe, K., Yamamoto, K., Tohyama, O. and Ito, H., “Active endscope with SMA (shaft memory alloy) coil springs”, Proc. IEEE Micro Electro Mechanical Systems Workshop, San Diego, CA, February 1996, pp. 290‐5.

4. 4Hosotani, K., Maeda, S., Tohyama, O. and Ito, H., “Fiberscope‐type environmental monitoring devices with binocular parallax accommodation mechanism for stereoscopic observation”, Proc. IEEE Micro Electro Mechanical Systems Workshop, Nagoya, Japan, January 1997, pp. 400‐5.

5. 5Ikeda, M., Goto, H., Totani, H., Sakata, M. and Yada, T., “Two‐dimensional miniature optical‐scanning sensor with silicon micromachined scanning mirror”, Proc. SPIE Photonic West ’97, San Jose, February 1997.

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