An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication-Reference-Cited by-同舟云学术

An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication

Published:2006-03-01 Issue:2 Volume:33 Page:88-96
ISSN:0143-991X
Container-title:Industrial Robot: An International Journal
language:en
Short-container-title:

Author:

Zhang Mingjun,Tao Weimin,Fisher William,Tarn Tzyh‐Jong

Abstract

PurposeFor semiconductor and gene‐chip microarray fabrication, robots are widely used to handle workpieces. It is critical that robots can calibrate themselves regularly and estimate workpiece pose automatically. This paper proposes an industrial method for automatic robot calibration and workpiece pose estimation.Design/methodology/approachThe methods have been implemented using an air‐pressure sensor and a laser sensor.FindingsExperimental results conducted in an industrial manufacturing environment show efficiency of the methods.Originality/valueThe contribution of this paper consists of an industrial solution to automatic robot calibration and workpiece pose estimation for automatic semiconductor and gene‐chip microarray fabrication.

Publisher

Emerald

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Control and Systems Engineering

Reference9 articles.

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