Structural, optical and sensing properties of ZnS thick films deposited by RF magnetron sputtering technique at different powers

Abstract

Purpose This study aims to carry out the deposition of zinc sulfide (ZnS) thick films on glass and silicon (100) substrates using radio frequency (RF) magnetron sputtering method at different powers. Film structure has been analyzed by X-ray diffraction (XRD); the patterns showed that the films possesses a cubic structure with (111) preferred orientation. Photoluminance (PL) intensity of the films has been related to the crystallinity, which is varied with the power. Design/methodology/approach Scanning electron microscope (SEM) images have been used to discover the films’ morphology. The stoichiometry has been confirmed by energy dispersive X-ray spectroscopy (EDX) analysis. MicroRaman spectroscopy has been used to validate the film structure. Gas-sensing studies were carried out by means of a static gas chamber to sense acetone, ethanol, methanol, H2O and NH3 vapor in air ambient. Findings ZnS has a stoichiometric and cubic structure. The band gaps and photoluminance intensity of the films are correlated with the crystallinity, which is varied with the power. The EDX analysis approved the stoichiometry of the prepared films. Acetone, ethanol, humidity (H2O), methanol and NH3 vapor gases were used to justify the sensing properties at 25°C of the thickest ZnS film. Originality/value High-quality ZnS films have been obtained at different powers without annealing. Gases sensing properties at 25°C are justified for deposited ZnS films using acetone, ethanol, humidity (H2O), methanol and NH3 vapor gases. It reveals good response for NH3 and humidity vapors at room temperature; the sensing functioning at this temperature was attractive in recent research.