Design of magnetically levitated 2D drive
Author:
Etxaniz Iñigo,Izpizua Alberto,San Martin Manex,Arana Joseba,Axpe Marta
Abstract
PurposeThe paper aims to introduces a design of a planar motor with six degrees of freedom (dof).Design/methodology/approachThe paper provides a description of the model.FindingsThe paper finds that this planar motor is magnetically levitated in four dof and magnetically driven in the other two. In the design of the system, structural characteristics of all elements as well as magnetic forces done by magnetic actuators have been taken into account. The model was realized by means fem and then was simulated dynamically in developed Simulink model. The design of the system has been greatly influenced by the sensor system. Hall effect proves have been introduced in some parts of the system. Magnetic flux density, and its direction can be measured in different parts of the system.Originality/valueThe paper describes the design of a planar motor with six dof.
Subject
Applied Mathematics,Electrical and Electronic Engineering,Computational Theory and Mathematics,Computer Science Applications
Reference3 articles.
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2. Etxaniz, I. et al. (2005), “Six degrees of freedom table for nanometric displacement by means of magnetic actuators”, Proc. of 5th Euspen International Conference.
3. Kim, W.‐J. et al. (1997), “Linear motor‐levitated stage for photolithograpy”, Annals of the CIRP, Vol. 46, pp. 447‐50.
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