A Principle of a Hybrid Microwave Power Sensor Based on Thermometric
Measurements
Author:
Xavier P.,Rauly D.,Daullé A.
Abstract
A new principle of sensor is proposed for determination of microwave power in planar structures, through the direct measurement
of a temperature gradient in the substrate induced by the dissipation of the power in a resistive matched
load. The nodal thermal simulation tool of the ESACAP™ program was used which helped to
determine that this gradient is proportional to the dissipated power. It can be measured by two
resistive microthermometers under the ground plane which also plays the role of shield. In a first step, a
hybrid sensor was designed of intrinsic sensitivity S=45°C/W, for a power range of
10 mW‐375 mW, and for an ambient temperature which can vary between 10°C and
100°C ( the sensitivity variation is around 10 ppm/°C). A prohibitive
0‐95% response time of 650 ms was found.. Consequently, a simulation of a smaller
size sensor (volume divided by 1000) was performed, which revealed a strongly reduced
time constant (8.5 ms).
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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