Design, fabrication and experimental analysis of piezoresistive bidirectional acoustic sensor

Abstract

Purpose Identification of the direction of the sound source is very important for human–machine interfacing in the applications such as target detection on military applications and wildlife conservation. Considering its vast applications, this study aims to design, simulate, fabricate and test a bidirectional acoustic sensor having two cantilever structures coated with piezoresistive material for sensing has been designed, simulated, fabricated and tested. Design/methodology/approach The structure is a piezoresistive acoustic pressure sensor, which consists of two Kapton diaphragms with four piezoresistors arranged in Wheatstone bridge arrangement. The applied acoustic pressure causes diaphragm deflection and stress in diaphragm hinge, which is sensed by the piezoresistors positioned on the diaphragm. The piezoresistive material such as carbon or graphene is deposited at maximum stress area. Furthermore, the Wheatstone bridge arrangement has been formed to sense the change in resistance resulting into imbalanced bridge and two cantilever structures add directional properties to the acoustic sensor. The structure is designed, fabricated and tested and the dimensions of the structure are chosen to enable ease of fabrication without clean room facilities. This structure is tested with static and dynamic calibration for variation in resistance leading to bridge output voltage variation and directional properties. Findings This paper provides the experimental results that indicate sensor output variation in terms of a Wheatstone bridge output voltage from 0.45 V to 1.618 V for a variation in pressure from 0.59 mbar to 100 mbar. The device is also tested for directionality using vibration source and was found to respond as per the design. Research limitations/implications The fabricated devices could not be tested for practical acoustic sources due to lack of facilities. They have been tested for a vibration source in place of acoustic source. Practical implications The piezoresistive bidirectional sensor can be used for detection of direction of the sound source. Social implications In defense applications, it is important to detect the direction of the acoustic signal. This sensor is suited for such applications. Originality/value The present paper discusses a novel yet simple design of a cantilever beam-based bidirectional acoustic pressure sensor. This sensor fabrication does not require sophisticated cleanroom for fabrication and characterization facility for testing. The fabricated device has good repeatability and is able to detect the direction of the acoustic source in external environment.