Abstract
PurposeThe purpose of this paper is to provide a review of recent progress in self‐assembly technology, principally in the microelectronics context.Design/methodology/approachFirst, the paper discusses the application of nanoscale self‐assembly techniques to microelectronic and related components and then considers research involving larger devices.FindingsThe paper shows that a range of self‐assembly techniques is being used to fabricate both production and experimental microelectronic devices, often with the aim of developing alternatives to copper wire interconnects. Other, experimental self‐assembly techniques are being developed for the packaging and mounting of microelectronic components on substrates.Originality/valueProvides a useful, detailed review of the use of self‐assembly techniques at the nanoscale, microscale and macroscale.
Subject
Industrial and Manufacturing Engineering,Control and Systems Engineering
Reference6 articles.
1. Chai, J., Wang, D., Fan, X. and Buriak, J.M. (2007), “Assembly of aligned linear metallic patterns on silicon”, Nature Nanotechnology, Vol. 2, pp. 500‐6.
2. Close, G.F., Yasuda, S., Paul, B., Fujita, S. and Wong, H‐S.P. (2008), “A 1 GHz integrated circuit with carbon nanotube interconnects and silicon transistors”, Nano Letters, Vol. 8, pp. 706‐9.
3. Fang, J. and Böhringer, K.F. (2006), “Wafer‐level packaging based on uniquely orienting self‐assembly (the DUO‐SPASS processes)”, Journal of Microelectro‐mechanical Systems, Vol. 15, pp. 531‐40.
4. Guarini, K.W., Black, C.T., Zhang, Y., Babich, I.V., Sikorski, E.M. and Gignac, L.M. (2003), “Low voltage, scalable nanocrystal FLASH memory fabricated by templated self assembly”, Proceedings of Electron Devices Meeting, IEDM '03 Technical Digest, IEEE International.
5. Knuesel, R., Bose, S., Zheng, W. and Jacobs, H.O. (2007), “Engineered solder‐directed self‐assembly across length scales”, Proceedings of Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro‐ and Nanoelectronics, MRS, Vol. 990.
Cited by
24 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献