Modeling and simulation of an ultra-low frequency and low-pressure resonator

Abstract

Purpose Detection of low-frequency pressures such as heart rate in the range of 1 Hz is one of the applications of low-frequency resonator. In this paper, the structure of the resonator is in the form of a plate, whose mathematical model has been extracted according to past works and is reported. Design/methodology/approach This paper presents an electromechanical microresonator that can be used as an ultra-low-frequency pressure sensor. It is very important to choose the right material for the sensors to have the optimal conditions. In this work, by proposing the innovative use of polytetrafluoroethylene material with low stiffness coefficient, the necessary conditions are provided to reduce the vibration frequency of the resonator. Findings The proposed design is simulated with the help of COMSOL, and its results are compared with the results of the mathematical model, which are very close to each other. Therefore, by inferring the results, the authors can rely on accurate simulations and finalize the similar designs with full confidence before fabrication. Originality/value There are important advantages regarding the geometry of the proposed design structure that is the possibility of detecting a pressure of 1 Pa only with voltages less than 2 V. On the other hand, the pull-in effect causes very low frequencies to be achieved in detection with the help of the proposed resonator. Also, the linear and nonlinear behavior of the resonator by applying different pressures has been studied and reported to find the appropriate operating range of the resonator and its limitations.