Effect of oxygen to argon ratio on the electrical performance of Ta2O5 gate dielectric thin film transistor
Author:
WANG Chao, ,LIU Fu-nan,YANG Fan,ZHANG Han-yue,YANG Xiao-tian, ,
Publisher
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Subject
Instrumentation,Signal Processing,Electronic, Optical and Magnetic Materials