Interferometry of double-sided polished wafer and error analysis
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Published:2023
Issue:4
Volume:16
Page:916-932
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ISSN:2097-1842
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Container-title:Chinese Optics
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language:en
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Short-container-title:zggx
Author:
Xiao-yue BIAN, ,Sen HAN,Quan-ying WU, ,
Publisher
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Subject
Atomic and Molecular Physics, and Optics