Rad: A Comprehensive Software System for Analytical Electron Microscopy

Abstract

An analytical electron microscope (AEM) provides the capability of obtaining both compositional and crystallographic information. While the acquisition and reduction of x-ray EDS data is generally done by a small computer, the acquisition and analysis of electron diffraction data has remained a manual, off-line technique. A recently described technique1 has made possible the real-time acquisition and reduction of electron diffraction data with an AEM. However, as is the case with EDS analysis, electron diffraction analysis requires that a rather large body of data be processed in order to produce a relatively simple result.