Alternative Background Fitting for Electron Energy Loss Spectra

Abstract

Microanalysis using inner shell ionization edges in electron energy loss spectra obtained in an analytical electron microscope is now well established. In order to assess true edge profiles and obtain integrated intensities of the inner shell ionization edges of interest, it is first necessary to subtract the background. The background arises from the tails of preceding ionization edges, multiple plasmon excitations and valence electron excitations.